項目

單位

規格值

氟化銨

NH4F

wt %

39.6-40.2

氫氟酸

HF

wt %

0.2-0.3

氯化物Chloride

Cl

ppm

≤0.5

硝酸鹽Nitrate

NO₃

ppm

≤0.1

磷酸鹽Phosphate

PO₄

ppm

≤0.03

硫酸鹽Sulfate

SO₄

ppm

≤0.1

色度  Color

APHA

黑曾

≤10

顆粒 Particles (＞0.2μm)

個/mL

Pcs /mL

≤200

銀Silver

Ag

ppb

≤0.1

鋁Aluminum

Al

ppb

≤0.1

砷Arsenic

As

ppb

≤0.1

金Gold

Au

ppb

≤0.1

硼Boron

B

ppb

≤0.1

鋇Barium

Ba

ppb

≤0.1

鈹Beryllium

Be

ppb

≤0.1

鉍Bismuth

Bi

ppb

≤0.1

鈣Calcium

Ca

ppb

≤0.1

鎘Cadmium

Cd

ppb

≤0.1

鈷Cobalt

Co

ppb

≤0.1

鉻Chromium

Cr

ppb

≤0.1

銅Copper

Cu

ppb

≤0.1

鐵Iron

Fe

ppb

≤0.1

鎵Gallium

Ga

ppb

≤0.1

鍺Germanium

Ge

ppb

≤0.1

鉀Potassium

K

ppb

≤0.1

鋰Lithium

Li

ppb

≤0.1

鎂Magnesium

Mg

ppb

≤0.1

錳Manganese

Mn

ppb

≤0.1

鉬Molybdenum

Mo

ppb

≤0.1

鈉Sodium

Na

ppb

≤0.1

鈮Niobium

Nb

ppb

≤0.1

鎳Nickel

Ni

ppb

≤0.1

鉛Lead

Pb

ppb

≤0.1

銻Antimony

Sb

ppb

≤0.1

錫Tin

Sn

ppb

≤0.1

鍶Strontium

Sr

ppb

≤0.1

鉭Tantalum

Ta

ppb

≤0.1

鈦Titanium

Ti

ppb

≤0.1

鉈Thallium

Tl

ppb

≤0.1

釩Vanadium

V

ppb

≤0.1

鋅Zinc

Zn

ppb

≤0.1

鋯Zirconium

Zr

ppb

≤0.1