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仕様値

Ammonium fluoride

NH4F

wt %

39.6-40.2

Hydrofluoric acid

HF

wt %

0.2-0.3

Chloride

Cl

ppm

≤0.5

Nitrate

NO₃

ppm

≤0.1

Phosphate

PO₄

ppm

≤0.03

Sulfate

SO₄

ppm

≤0.1

Color

APHA

Hazen

≤10

Particles (＞0.2μm)

/mL

Pcs /mL

≤200

Silver

Ag

ppb

≤0.1

Aluminum

Al

ppb

≤0.1

Arsenic

As

ppb

≤0.1

Gold

Au

ppb

≤0.1

Boron

B

ppb

≤0.1

Barium

Ba

ppb

≤0.1

Beryllium

Be

ppb

≤0.1

Bismuth

Bi

ppb

≤0.1

Calcium

Ca

ppb

≤0.1

Cadmium

Cd

ppb

≤0.1

Cobalt

Co

ppb

≤0.1

Chromium

Cr

ppb

≤0.1

Copper

Cu

ppb

≤0.1

Iron

Fe

ppb

≤0.1

Gallium

Ga

ppb

≤0.1

Germanium

Ge

ppb

≤0.1

Potassium

K

ppb

≤0.1

Lithium

Li

ppb

≤0.1

Magnesium

Mg

ppb

≤0.1

Manganese

Mn

ppb

≤0.1

Molybdenum

Mo

ppb

≤0.1

Sodium

Na

ppb

≤0.1

Niobium

Nb

ppb

≤0.1

Nickel

Ni

ppb

≤0.1

Lead

Pb

ppb

≤0.1

Antimony

Sb

ppb

≤0.1

Tin

Sn

ppb

≤0.1

Strontium

Sr

ppb

≤0.1

Tantalum

Ta

ppb

≤0.1

Titanium

Ti

ppb

≤0.1

Thallium

Tl

ppb

≤0.1

Vanadium

V

ppb

≤0.1

Zinc

Zn

ppb

≤0.1

Zirconium

Zr

ppb

≤0.1